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Theoretical and experimental nonlinear dynamics of a clamped-clamped beam MEMS resonator

Henk NIJMEIJER, Rob Fey, Rob Mestrom
Microelectromechanical resonators feature nonlinear dynamic responses. A first-principles based modeling approach is proposed for a clamped-clamped beam resonator. Starting from the partial differential equation for the beam including geometric and electrostatic nonlinear effects, a reduced-order model is derived. The model captures the experimentally observed nonlinear dynamic behaviour of the resonator and allows for fast simulation and prediction of its response.
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